DocumentCode

819206

Title

Measuring the thickness of a thin film conductor using solenoid coils

Author

Nakane, Hiroshi ; Sohara, Yoshio ; Omori, Shunichi

Author_Institution

Science University of Tokyo

Volume

40

Issue

2

fYear

1991

fDate

4/1/1991 12:00:00 AM

Firstpage

429

Lastpage

432

Keywords

Conducting materials; Conductive films; Conductivity; Conductors; Frequency; Impedance; Solenoids; Superconducting coils; Thickness measurement; Transistors;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.1990.1032978

Filename

1032978