• DocumentCode
    822216
  • Title

    A study of variable EWMA controller

  • Author

    Tseng, Sheng-Tsaing ; Yeh, Arthur B. ; Tsung, Fugee ; Chan, Yun-Yu

  • Author_Institution
    Inst. of Stat., Nat. Tsing-Hua Univ., Hsinchu, Taiwan
  • Volume
    16
  • Issue
    4
  • fYear
    2003
  • Firstpage
    633
  • Lastpage
    643
  • Abstract
    The exponentially weighted moving average (EWMA) feedback controller (with a fixed discount factor) is a popular run by run control scheme which primarily uses data from past process runs to adjust settings for the next run. Although the EWMA controller with a small discount factor can guarantee a long-term stability (under fairly regular conditions), it usually requires a moderately large number of runs to bring the output of a process to its target. This is impractical for process with small batches. The reason is that the output deviations are usually very large at the beginning of the first few runs and, as a result, the output may be out of process specifications. In order to reduce a possibly high rework rate, the authors propose a variable discount factor to tackle the problem. They state the main results in which the stability conditions and the optimal variable discount factor of the proposed EWMA controller are derived. An example is given to demonstrate the performance. Moreover, a heuristic is proposed to simplify the computation of the variable discount factor. It is seen that the proposed method is easy to implement and provides a good approximation to the optimal variable discount factor.
  • Keywords
    controllers; feedback; moving average processes; process control; exponentially weighted moving average feedback controller; run-by-run process control; stability analysis; variable discount factor; Automatic control; Etching; Feedback control; Input variables; Manufacturing processes; Mechanical variables control; Process control; Size control; Stability; Statistics;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2003.818960
  • Filename
    1243976