Title : 
22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009)
         
        
        
        
        
        
        
            Abstract : 
Provides notice of upcoming conference events of interest to practitioners and researchers.
         
        
        
            Journal_Title : 
Microelectromechanical Systems, Journal of
         
        
        
        
        
            DOI : 
10.1109/JMEMS.2008.929075