Title :
Fabrication and characterisation of CMOS compatible silicon nanowire biosensor
Author :
Kang, G.B. ; Park, J.M. ; Kim, S.G. ; Koo, J.G. ; Park, J.H. ; Sohn, Y.-S. ; Kim, Y.T.
Author_Institution :
Nano Sci. Res. Div., Korea Inst. of Sci. & Technol., Seoul
Abstract :
A silicon nanowire (SiNW) biosensor for label-free and real-time detection has been fabricated by complementary metal-oxide semiconductor (CMOS) technology. For the detection of prostate-specific antigen (PSA) used as a biomarker of prostate cancer the SiNW surface was modified to immobilise the antibody of PSA (anti-PSA). Real-time monitoring reveals the change in conductivity of the SiNW on specific binding of PSA to anti-PSA. For 355 nm SiNW, the response to 10 ng/ml of PSA was 7.3 .
Keywords :
CMOS integrated circuits; biological techniques; cancer; electrical conductivity; elemental semiconductors; microsensors; nanobiotechnology; nanowires; patient monitoring; semiconductor quantum wires; silicon; Si; biomarker; compatible silicon nanowire biosensor; conductivity; label-free detection; metal-oxide semiconductor technology; prostate cancer; prostate-specific antigen; real-time monitoring; size 355 nm;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20081876
