DocumentCode
823425
Title
Anode Sputtering Characteristics of the Berkeley 2.5 MV Source
Author
Gavin, Basil
Author_Institution
Lawrence Berkeley Laboratory University of California Berkeley, California 94720
Volume
23
Issue
2
fYear
1976
fDate
4/1/1976 12:00:00 AM
Firstpage
1008
Lastpage
1012
Abstract
This paper reports an investigation of a number of parameters affecting the performance of the SuperHILAC 2.5 MV Adam injector source. The description will emphasize anode sputtered materials, and will discuss in some detail calcium and gold ion production. Parameters varied include electrode geometry, support gas type and electrode bias, to optimize beam intensity and electrode consumption. A factor of three improvement with high n+ gold ions appears evident with a new displaced electrode geometry. The source is operated in cold mode, is pulsed and operates usually at less than 0.6 amperes average current. Under these conditions source life has been measured to be sixteen hours at 25% duty factor, when generating calcium ions, with neon support gas.
Keywords
Anodes; Calcium; Cathodes; Electrodes; Geometry; Gold; Plasma materials processing; Plasma sheaths; Production; Sputtering;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1976.4328393
Filename
4328393
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