• DocumentCode
    823621
  • Title

    A Review of Sputter Negative Ion Sources

  • Author

    Middleton, Roy

  • Author_Institution
    Physics Department, University of Pennsylvania Philadelphia, Pennsylvania 19174
  • Volume
    23
  • Issue
    2
  • fYear
    1976
  • fDate
    4/1/1976 12:00:00 AM
  • Firstpage
    1098
  • Lastpage
    1103
  • Abstract
    A brief account of cesium sputter ion sources is presented with particular emphasis being placed on sources that use a cesium beam as the sputter agent. Some thoughts are also presented on the mechanism whereby negative ions are formed by the sputtering of low work function surfaces. The possibility of increasing negative ion yields still further by the deposition of additional neutral cesium or some other alkali metal is discussed.
  • Keywords
    Electron beams; Electron tubes; Ion accelerators; Ion sources; Ionization; Irrigation; Lanthanum; Physics; Solids; Sputtering;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1976.4328413
  • Filename
    4328413