DocumentCode
823621
Title
A Review of Sputter Negative Ion Sources
Author
Middleton, Roy
Author_Institution
Physics Department, University of Pennsylvania Philadelphia, Pennsylvania 19174
Volume
23
Issue
2
fYear
1976
fDate
4/1/1976 12:00:00 AM
Firstpage
1098
Lastpage
1103
Abstract
A brief account of cesium sputter ion sources is presented with particular emphasis being placed on sources that use a cesium beam as the sputter agent. Some thoughts are also presented on the mechanism whereby negative ions are formed by the sputtering of low work function surfaces. The possibility of increasing negative ion yields still further by the deposition of additional neutral cesium or some other alkali metal is discussed.
Keywords
Electron beams; Electron tubes; Ion accelerators; Ion sources; Ionization; Irrigation; Lanthanum; Physics; Solids; Sputtering;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1976.4328413
Filename
4328413
Link To Document