DocumentCode :
823621
Title :
A Review of Sputter Negative Ion Sources
Author :
Middleton, Roy
Author_Institution :
Physics Department, University of Pennsylvania Philadelphia, Pennsylvania 19174
Volume :
23
Issue :
2
fYear :
1976
fDate :
4/1/1976 12:00:00 AM
Firstpage :
1098
Lastpage :
1103
Abstract :
A brief account of cesium sputter ion sources is presented with particular emphasis being placed on sources that use a cesium beam as the sputter agent. Some thoughts are also presented on the mechanism whereby negative ions are formed by the sputtering of low work function surfaces. The possibility of increasing negative ion yields still further by the deposition of additional neutral cesium or some other alkali metal is discussed.
Keywords :
Electron beams; Electron tubes; Ion accelerators; Ion sources; Ionization; Irrigation; Lanthanum; Physics; Solids; Sputtering;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1976.4328413
Filename :
4328413
Link To Document :
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