Title :
A Review of Sputter Negative Ion Sources
Author_Institution :
Physics Department, University of Pennsylvania Philadelphia, Pennsylvania 19174
fDate :
4/1/1976 12:00:00 AM
Abstract :
A brief account of cesium sputter ion sources is presented with particular emphasis being placed on sources that use a cesium beam as the sputter agent. Some thoughts are also presented on the mechanism whereby negative ions are formed by the sputtering of low work function surfaces. The possibility of increasing negative ion yields still further by the deposition of additional neutral cesium or some other alkali metal is discussed.
Keywords :
Electron beams; Electron tubes; Ion accelerators; Ion sources; Ionization; Irrigation; Lanthanum; Physics; Solids; Sputtering;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1976.4328413