DocumentCode :
823753
Title :
Exact solution of multilayered piezoelectric diaphragms
Author :
Yao, Linquan ; Lu, Li ; Wang, Zhihong ; Zhu, Weiguang ; Dai, Ying
Volume :
50
Issue :
10
fYear :
2003
Firstpage :
1262
Lastpage :
1271
Abstract :
This paper investigates dynamic behavior of multilayered piezoelectric diaphragms that are simplified as laminated plates. The validity of the dynamic analysis based on the simplified clamped multilayered plate model has first been studied using ANSYS finite element (FE)-codes. The simplified, clamped, multilayered plate model has been verified to be a reasonable one in comparison with the exact model. Subsequently, the frequency characteristics of clamped rectangular piezoelectric laminated plates were further analytically investigated. Using the classical laminated plate theory, mechanical, electrical, and electromechanical characteristics of the multilayered piezoelectric diaphragms were studied. For ease of calculation, the dimensionless method was adopted. Furthermore, numerical analysis was carried out using the Rayleigh-Ritz method. Influence of dimensions of the laminar diaphragm on natural frequencies also was studied. The thickness ratio of the PZT layer to the total thickness of the laminar diaphragm has been optimized to obtain the largest deflection.
Keywords :
Rayleigh-Ritz methods; diaphragms; finite element analysis; micromechanical devices; piezoelectric devices; ANSYS finite element codes; MEMS devices; PZT; PbZrO3TiO3; Rayleigh-Ritz method; clamped multilayered plate model; dimensionless method; dynamic behavior; electromechanical characteristics; frequency characteristics; laminated plate theory; laminated plates; multilayered piezoelectric diaphragms; thickness ratio; Electromechanical sensors; Fabrication; Finite element methods; Frequency; Mechanical sensors; Microelectromechanical devices; Numerical analysis; Piezoelectric actuators; Predictive models; Sensor systems;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2003.1244742
Filename :
1244742
Link To Document :
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