Analysis of 3-D metallization structures by a full-wave spectral-domain technique

Author

Becks, Thomas ; Wolff, Ingo

Author_Institution

Dept. of Electr. Eng., Duisburg Univ., Germany

Volume

40

Issue

12

fYear

1992

fDate

12/1/1992 12:00:00 AM

Firstpage

2219

Lastpage

2227

Abstract

A full-wave method for the investigation of microstrip and coplanar structures including 3-D metallization structures is presented. The spectral-domain analysis method is used to calculate the S-parameters of unshielded microwave components containing bond-wires and air-bridges. The general formulation and the implementation procedure of the method are described. The application of the theory is given by a comparison of measured and calculated results for a spiral inductor, including an air-bridge

Keywords

S-parameters; metallisation; microstrip components; spectral-domain analysis; strip line components; waveguide theory; 3D structures; S-parameters; air-bridges; bond-wires; coplanar structures; full-wave spectral-domain technique; metallization structures; microstrip; spiral inductor; unshielded microwave components; Bonding; Circuit synthesis; Integral equations; Metallization; Microstrip; Microwave theory and techniques; Scattering parameters; Spectral analysis; Spirals; Surface waves;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.179883

Filename

179883