Title :
Analysis of 3-D metallization structures by a full-wave spectral-domain technique
Author :
Becks, Thomas ; Wolff, Ingo
Author_Institution :
Dept. of Electr. Eng., Duisburg Univ., Germany
fDate :
12/1/1992 12:00:00 AM
Abstract :
A full-wave method for the investigation of microstrip and coplanar structures including 3-D metallization structures is presented. The spectral-domain analysis method is used to calculate the S-parameters of unshielded microwave components containing bond-wires and air-bridges. The general formulation and the implementation procedure of the method are described. The application of the theory is given by a comparison of measured and calculated results for a spiral inductor, including an air-bridge
Keywords :
S-parameters; metallisation; microstrip components; spectral-domain analysis; strip line components; waveguide theory; 3D structures; S-parameters; air-bridges; bond-wires; coplanar structures; full-wave spectral-domain technique; metallization structures; microstrip; spiral inductor; unshielded microwave components; Bonding; Circuit synthesis; Integral equations; Metallization; Microstrip; Microwave theory and techniques; Scattering parameters; Spectral analysis; Spirals; Surface waves;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
