Title :
Radiation Induced Leakage Currents in Silicon on Sapphire MOS Transistors
Author :
Wang, S.T. ; Royce, B.S.H.
Author_Institution :
Materials Laboratory, Princeton University Princeton, New Jersey 08540
Abstract :
Measurements are reported in which photodepopulation and thermal bleaching techniques have been applied to the study of radiation induced trapped positive charge in the Al2O3 substrate of n-channel MOS/SOS devices. Photodepopulation data indicates an optical depth for the hole traps of 2.5 eV. Thermal bleaching studies yield a corresponding thermal depth of 0.75 eV. Some preliminary thermally stimulated current measurements which reveal additional low temperature stable traps are also reported.
Keywords :
Aluminum oxide; Bleaching; Charge carrier processes; Charge measurement; Current measurement; Leakage current; MOSFETs; Silicon; Stimulated emission; Temperature;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1976.4328544