Title :
Hybrid integration of semiconductor lasers with Si-based single-mode ridge waveguides
Author :
Friedrich, Etienne E L ; Öberg, Magnus G. ; Broberg, Björn ; Nilsson, Stefan ; Valette, Serge
Author_Institution :
Swedish Inst. of Microelectron. Kista, Sweden
fDate :
3/1/1992 12:00:00 AM
Abstract :
Hybridization is a convenient way for providing silicon-based integrated optical circuits with a laser source. An entirely passive alignment technique exclusively based on the high precision obtainable by lithography and by semiconductor processes was examined. A novel way of cleaving the laser chips by self-aligned cleaving grooves was employed. It resulted in 15.5-dB coupling losses between the laser diode and the single-mode buried ridge waveguide
Keywords :
integrated optics; optical losses; optical waveguides; photolithography; semiconductor junction lasers; semiconductor technology; 15.5 dB; Si-based single-mode ridge waveguides; buried ridge waveguide; coupling losses; high precision; hybrid integration; integrated optical circuits; laser chips; laser diode; laser source; lithography; passive alignment technique; photolithography; self-aligned cleaving grooves; semiconductor lasers; semiconductor processes; Coupling circuits; Diode lasers; Integrated optics; Lithography; Optical coupling; Optical losses; Optical waveguides; Semiconductor lasers; Semiconductor waveguides; Waveguide lasers;
Journal_Title :
Lightwave Technology, Journal of
