DocumentCode
825872
Title
Thin Epitaxial Silicon for De/Dx Detectors
Author
Maggiore, C.J. ; Goldstone, P.D. ; Gruhn, C.R. ; Jarmie, Nelson ; Stotlar, S.C. ; DeHaven, H.V.
Volume
24
Issue
1
fYear
1977
Firstpage
104
Lastpage
108
Abstract
The techniques for fabricating thin self-supporting epitaxial films for dE/dx detectors have been studied. Detectors having thicknesses between 1 and 4 ¿m with areas of 12.5 mm2 have been fabricated and tested. The response of the detectors has been studied with alpha particles, oxygen ions, and fission fragments.
Keywords
Alpha particles; Conductivity; Epitaxial layers; Etching; Fabrication; Probes; Radiation detectors; Schottky barriers; Silicon; Substrates;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1977.4328650
Filename
4328650
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