Title :
Special Section on the Advanced Semiconductor Manufacturing Conference 2007 (ASMC 2007)
Author :
Patterson, Oliver D. ; Melzner, Hanno ; Beeg, Thomas
Abstract :
The ten papers in this special section were based on ideas originally introduced at the Advanced Semiconductor Manufacturing Conference (ASMC), Stresa, Italy, June 11-12, 2007. The papers are summarized here.
Keywords :
Components, Packaging, and Manufacturing Technology Society; Inspection; Lithography; Manufacturing automation; Metrology; Process control; Pulp manufacturing; Semiconductor device manufacture; Semiconductor materials; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2008.2001202
