DocumentCode
826050
Title
Special Section on the Advanced Semiconductor Manufacturing Conference 2007 (ASMC 2007)
Author
Patterson, Oliver D. ; Melzner, Hanno ; Beeg, Thomas
Volume
21
Issue
3
fYear
2008
Firstpage
306
Lastpage
307
Abstract
The ten papers in this special section were based on ideas originally introduced at the Advanced Semiconductor Manufacturing Conference (ASMC), Stresa, Italy, June 11-12, 2007. The papers are summarized here.
Keywords
Components, Packaging, and Manufacturing Technology Society; Inspection; Lithography; Manufacturing automation; Metrology; Process control; Pulp manufacturing; Semiconductor device manufacture; Semiconductor materials; Special issues and sections;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2008.2001202
Filename
4589042
Link To Document