DocumentCode :
826433
Title :
The MEMS handbook [Book Review]
Volume :
18
Issue :
5
fYear :
2002
Firstpage :
42
Lastpage :
44
Keywords :
Book reviews; Cyclic redundancy check; Electron tubes; Fabrication; Lithography; Microelectromechanical systems; Micromechanical devices; Optical switches; Transistors; Very large scale integration;
fLanguage :
English
Journal_Title :
Circuits and Devices Magazine, IEEE
Publisher :
ieee
ISSN :
8755-3996
Type :
jour
DOI :
10.1109/MCD.2002.1035353
Filename :
1035353
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=826433
