Title :
10-Gb/s Direct Modulation of Widely Tunable 1550-nm MEMS VCSEL
Author :
Paul, Sujoy ; Gierl, Christian ; Cesar, Julijan ; Quang Trung Le ; Malekizandi, Mohammadreza ; Kogel, Benjamin ; Neumeyr, Christian ; Ortsiefer, Markus ; Kuppers, Franko
Author_Institution :
Inst. for Microwave Eng. & Photonics, Techniche Univ. Darmstadt, Darmstadt, Germany
Abstract :
We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiOx/SiNy-based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a low-temperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of surface micromachining. More than 60 nm of mode-hop free continuous tuning with a center wavelength of 1554 nm is achieved. A maximum 3-dB small-signal modulation response (S21) bandwidth of 7.05 GHz is reported. Quasi-error-free operation of a back-to-back link is demonstrated at 10 Gb/s for a record 47-nm tuning range, showing the compatibility of the MEMS tunable VCSEL as a cost-effective optical source in access networks and interconnects.
Keywords :
III-V semiconductors; distributed Bragg reflector lasers; indium compounds; laser cavity resonators; laser tuning; micro-optomechanical devices; microactuators; micromachining; optical communication equipment; optical links; optical modulation; plasma CVD; quantum well lasers; silicon compounds; surface emitting lasers; DBR; InP-SiOx-SiNy; MEMS distributed Bragg reflector; access networks; back-back link; bandwidth 7.05 GHz; bit rate 10 Gbit/s; direct modulation; electrothermal actuation; interconnects; low-temperature plasma-enhanced chemical vapor deposition chamber; mode-hop free continuous tuning; optical source; quasierror-free operation; small-signal modulation response bandwidth; surface micromachining; wavelength 1550 nm; wavelength tuning; widely tunable MEMS VCSEL; widely tunable microelectromechanical system vertical-cavity surface-emitting laser; Distributed Bragg reflectors; Micromechanical devices; Modulation; Optical surface waves; Stimulated emission; Tuning; Vertical cavity surface emitting lasers; Tunable; direct modulation; electro-thermal tuning; micro-electro-mechanical system (MEMS); optical communication; surface micromachining; vertical-cavity surface-emitting laser (VCSEL); vertical-cavity surfaceemitting laser (VCSEL);
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2015.2418218
