Title :
Novel High-Temperature Fiber-Optic Pressure Sensor Based on Etched PCF F-P Interferometer Micromachined by a 157-nm Laser
Author :
Zengling Ran ; Shan Liu ; Qin Liu ; Yanjun Wang ; Haihong Bao ; Yunjiang Rao
Author_Institution :
Key Lab. of Opt. Fiber Sensing & Commun., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
A self-enclosed fiber-optic Fabry-Perot (F-P) cavity is created by splicing a single-mode fiber to a photonic crystal fiber (PCF) with a precise hole micromachined by a 157-nm laser at the end face of the PCF. Furthermore, such a F-P cavity is etched chemically and its high-temperature and pressure responses are investigated experimentally. The pressure sensitivity is ~54.7 pm/MPa and the temperature sensitivity is ~0.45 pm/°C. The proposed sensor could offer some excellent features such as good high-temperature stability, low cross-sensitivity between pressure and temperature, ease of mass-production, making it attractive for pressure measurement under high-temperature.
Keywords :
Fabry-Perot interferometers; etching; fibre optic sensors; holey fibres; micromachining; microsensors; photonic crystals; pressure measurement; pressure sensors; stability; temperature measurement; temperature sensors; F-P cavity; etched PCF F-P interferometer micromachining; high-temperature fiber-optic pressure sensor; high-temperature stability; photonic crystal fiber; precise hole micromachining; pressure measurement; self-enclosed fiber-optic Fabry-Perot cavity; single-mode fiber; splicing; wavelength 157 nm; Cavity resonators; Optical fiber sensors; Optical fibers; Sensitivity; Temperature measurement; Temperature sensors; Fiber-optic pressure sensor; Laser micro-machining; Photonic crystal fiber; high temperature; laser micro-machining; photonic crystal fiber;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2014.2371243
