DocumentCode
829209
Title
The influence of nonuniform doping profile on I -V characteristics of MOS transistors
Author
Lukasiak, Lidia ; Jakubowski, Andrzej
Author_Institution
Inst. of Microelectron. & Optoelectron., Warsaw Univ. of Technol., Poland
Volume
40
Issue
2
fYear
1993
fDate
2/1/1993 12:00:00 AM
Firstpage
453
Lastpage
455
Abstract
The influence of nonuniform doping on I -V characteristics of a MOS transistor is estimated. A modification of the Pao-Sah model (1966) is presented, which extends its validity on a box doping profile
Keywords
doping profiles; insulated gate field effect transistors; semiconductor device models; I-V characteristics; MOS transistors; Pao-Sah model; box doping profile; nonuniform doping profile; Capacitance; Doping profiles; Electrons; Electrostatics; MOSFET circuits; Microelectronics; Quasi-doping; Semiconductor process modeling; Substrates; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.182527
Filename
182527
Link To Document