New Generation of Crystal Quartz Thin-Film Multijunction Thermal Converters

Author

Scarioni, Luciana ; Klonz, Manfred ; Funck, Torsten ; Kessler, Ernst

Author_Institution

Dept. de Fisica, Univ. de Carabobo, Valencia

Volume

55

Issue

6

fYear

2006

Firstpage

2281

Lastpage

2285

Abstract

The design of a new generation of planar multijunction thermal converters (PMJTCs) on quartz membranes and on quartz crystal chips improves the frequency response of the PMJTC in the frequency range from 100 kHz to 100 MHz and allows a decrease in the uncertainties. For a heater resistance of 1 kOmega ac-dc voltage transfer differences smaller than 5 muV/V are calculated for frequencies above 100 kHz up to 1 MHz. This is a reduction of more than one order of magnitude in the ac-dc voltage transfer differences for such high heater resistance in comparison to the PMJTCs with Si₃N₄/SiO₂/Si₃N₄ sandwich membrane on a silicon chip. The quartz PMJTCs allow the improvement of the standard uncertainties to 3 muV/V in the frequency range of 100-500 kHz and 5 muV/V for 700 kHz to 1 MHz. The model for calculating the ac-dc voltage transfer differences and the uncertainty budget are given

Keywords

AC-DC power convertors; frequency response; piezoelectric thin films; quartz; sandwich structures; silicon compounds; 0.1 to 100 MHz; 1 kohm; Si₃N₄-SiO₂-Si₃N₄; ac-dc voltage transfer; frequency response; heater resistance; multijunction thermal converters; quartz crystal chips; quartz membranes; sandwich membrane; thin-film thermal converter; Biomembranes; Bonding; Electrical resistance measurement; Frequency conversion; Heat transfer; Resistance heating; Silicon; Transistors; Uncertainty; Voltage; AC–DC voltage transfer; high frequency; quartz-planar multijunction thermal converter (PMJTC); simulation;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2006.884130

Filename

4014735