• DocumentCode
    830778
  • Title

    Design and optimization of a MEMS electret-based capacitive energy scavenger

  • Author

    Peano, Fabio ; Tambosso, Tiziana

  • Author_Institution
    Dipt. di Energetica, Politecnico di Torino, Italy
  • Volume
    14
  • Issue
    3
  • fYear
    2005
  • fDate
    6/1/2005 12:00:00 AM
  • Firstpage
    429
  • Lastpage
    435
  • Abstract
    In this paper, a method for the design and optimization of an electret-based vibration-to-electric microconverter is presented, using a nonlinear dynamical model of the device. The dynamics of the converter is analyzed in detail, showing the importance of properly accounting for the nonlinearity in the optimization process. A procedure to determine a set of optimization parameters is finally presented.
  • Keywords
    convertors; direct energy conversion; electrets; micromechanical devices; nonlinear dynamical systems; small electric machines; MEMS electret-based capacitive energy scavenger; capacity converters; energy harvesting; nonlinear dynamical model; optimization process; vibration-to-electric microconverter; Capacitance; Capacitors; Design optimization; Electrets; Electrodes; Equations; Equivalent circuits; Fingers; Micromechanical devices; Voltage; Capacity converters; electret; energy harvesting; microelectromechanical systems (MEMS);
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2005.844803
  • Filename
    1438412