DocumentCode
830778
Title
Design and optimization of a MEMS electret-based capacitive energy scavenger
Author
Peano, Fabio ; Tambosso, Tiziana
Author_Institution
Dipt. di Energetica, Politecnico di Torino, Italy
Volume
14
Issue
3
fYear
2005
fDate
6/1/2005 12:00:00 AM
Firstpage
429
Lastpage
435
Abstract
In this paper, a method for the design and optimization of an electret-based vibration-to-electric microconverter is presented, using a nonlinear dynamical model of the device. The dynamics of the converter is analyzed in detail, showing the importance of properly accounting for the nonlinearity in the optimization process. A procedure to determine a set of optimization parameters is finally presented.
Keywords
convertors; direct energy conversion; electrets; micromechanical devices; nonlinear dynamical systems; small electric machines; MEMS electret-based capacitive energy scavenger; capacity converters; energy harvesting; nonlinear dynamical model; optimization process; vibration-to-electric microconverter; Capacitance; Capacitors; Design optimization; Electrets; Electrodes; Equations; Equivalent circuits; Fingers; Micromechanical devices; Voltage; Capacity converters; electret; energy harvesting; microelectromechanical systems (MEMS);
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2005.844803
Filename
1438412
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