DocumentCode
831061
Title
Technological Advances in the Manufacture of Radiation-Hardened CMOS Integrated Circuits
Author
Pikor, A. ; Reiss, E.M.
Author_Institution
RCA Solid State Division Route 202 Somerville, N. J. 08876
Volume
24
Issue
6
fYear
1977
Firstpage
2047
Lastpage
2050
Keywords
Annealing; CMOS integrated circuits; CMOS process; CMOS technology; Furnaces; Integrated circuit manufacture; Integrated circuit technology; Satellites; Temperature; Testing;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1977.4329162
Filename
4329162
Link To Document