• DocumentCode
    831061
  • Title

    Technological Advances in the Manufacture of Radiation-Hardened CMOS Integrated Circuits

  • Author

    Pikor, A. ; Reiss, E.M.

  • Author_Institution
    RCA Solid State Division Route 202 Somerville, N. J. 08876
  • Volume
    24
  • Issue
    6
  • fYear
    1977
  • Firstpage
    2047
  • Lastpage
    2050
  • Keywords
    Annealing; CMOS integrated circuits; CMOS process; CMOS technology; Furnaces; Integrated circuit manufacture; Integrated circuit technology; Satellites; Temperature; Testing;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1977.4329162
  • Filename
    4329162