Title :
A refractive free-space microoptical 4 x 4 interconnect on chip level with optical fan-out fabricated by the LIGA technique
Author :
Voigt, S. ; Kufner, S. ; Kufner, M. ; Frese, I.
Author_Institution :
Inst. for Mikrotechnik, Mainz Univ., Germany
Abstract :
A parallel purely refractive 4/spl times/4 optical data link has been built. The design is based on pairs of crossed cylindrical microlenses. The optical module is fabricated and monolithically integrated in. polymethyl methacrylate (PMMA) by the LIGA technique.
Keywords :
LIGA; aspherical optics; integrated circuit interconnections; integrated optoelectronics; micro-optics; microlenses; optical design techniques; optical fabrication; optical interconnections; optical polymers; optical receivers; optical transmitters; 4 by 4 interconnect; LIGA technique; PMMA; aspherical design; bridging elements; chip level; crossed cylindrical microlenses; design; integrated circuit interconnections; microlens array elements; micromirrors; monolithic integration; optical data communication; optical fan-out; optical module; parallel purely refractive 4/spl times/4 optical data link; polymethyl methacrylate; receiver arrays; refractive free-space microoptical 4/spl times/4 interconnect; transmitter arrays; Integrated circuit interconnections; Lenses; Microoptics; Optical arrays; Optical crosstalk; Optical device fabrication; Optical interconnections; Optical receivers; Optical refraction; Optical transmitters;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2002.801834
