Title :
Simulation and Fabrication of a Convective Gyroscope
Author :
Dau, Van Thanh ; Dao, Dzung Viet ; Shiozawa, Tatsuo ; Sugiyama, Susumu
Author_Institution :
Grad. Sch. of Sci. & Eng., Ritsumeikan Univ., Kusatsu
Abstract :
In this paper, we present the simulation and fabrication of the gas gyroscope. The gas flow inside the hermetically packed sensor is simulated by utilizing 3-D transient compressible flow analysis. The pump working principle and the effect of the Coriolis acceleration on the laminar jet are validated by both analytical formulas and experiments. The sensor utilizes a new sensing element consisting of a thermistor heated by an interior heater, which is independently power-supplied. The sensor performance can be adjusted by the applied voltage on the heater. Both heater and thermistor are optimized in terms of thermal stress. The effect of thermal stress in a p-type silicon thermistor reduces the performance of sensor by 9.5%. The sensor has been calibrated and the role of the heater is verified.
Keywords :
Coriolis force; aerodynamics; compressible flow; convection; elemental semiconductors; gyroscopes; heating elements; jets; laminar flow; micropumps; microsensors; silicon; thermal stresses; thermistors; 3-D transient compressible flow analysis; Coriolis acceleration effect; MEMS process; Si; convective gyroscope fabrication; gas flow; gas gyroscope simulation; heater; hermetically packed sensor; laminar jet; p-type silicon thermistor; pump working principle; sensor calibration; sensor performance; thermal stress effect; thermistor heating; Analytical models; Fabrication; Fluid flow; Gas detectors; Gyroscopes; Hermetic seals; Thermal sensors; Thermal stresses; Thermistors; Transient analysis; Convective gyroscope; dual axis; transient analysis;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2008.925457