• DocumentCode
    832670
  • Title

    Synthesis of Carbon Nanofibers and Pt-Nanocluster-Based Electrochemical Microsystems by Combining Low-Pressure Helicon Plasma Techniques

  • Author

    Caillard, Amael ; Charles, Christine ; Boswell, Rod W. ; Brault, Pascal

  • Author_Institution
    Res. Sch. of Phys. Sci. & Eng., Australian Nat. Univ., Canberra, ACT
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    882
  • Lastpage
    883
  • Abstract
    Although carbon-nanofiber (CNFs) or nanotube growth and their applications are well documented, engineering their shape and their integration in a microsystem for successful applications is an important issue. We report on the synthesis of aligned CNFs (ACNFs) covered by metallic catalytic nanoclusters by a combination of different low-pressure deposition techniques based on high-density radio-frequency helicon plasmas. An image of a ldquobright-dress-shaperdquo helicon plasma and of a synthesized ACNF coated by Pt nanoclusters is presented.
  • Keywords
    carbon fibres; electrochemistry; metal clusters; nanostructured materials; nanotechnology; plasma deposition; platinum; C-Pt; carbon-nanofiber; electrochemical microsystems; high-density radio-frequency helicon plasmas; low-pressure deposition; metallic catalytic nanoclusters; Inductors; Plasma applications; Plasma chemistry; Plasma devices; Plasma materials processing; Plasma sources; Plasma temperature; Shape; Sputtering; Substrates; Carbon nanofiber; chemical vapor deposition (CVD); microsystem; nanocluster; plasma;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.924422
  • Filename
    4598942