Title :
Amorphous Ge bipolar blocking contacts on Ge detectors
Author :
Luke, P.N. ; Cork, C.P. ; Madden, N.W. ; Rossington, C.S. ; Wesela, M.F.
Author_Institution :
Lawrence Berkeley Lab., California Univ., Berkeley, CA, USA
fDate :
8/1/1992 12:00:00 AM
Abstract :
The authors report on the performance of high-purity Ge radiation detectors with amorphous Ge (a-Ge) contacts fabricated using RF sputtering techniques. Electrical contacts formed using sputtered a-Ge films on high-purity Ge crystals, both n- and p-type, were found to exhibit good blocking behavior with low leakage currents, with the contact biased under either voltage polarity. The a-Ge contacts have thin dead layers associated with them, and can be used in place of lithium-diffused, ion-implanted, or Schottky barrier contacts on Ge radiation detectors. The use of such contacts allows fabrication of multi-electrode detectors by means of simple processing steps
Keywords :
Schottky effect; germanium; semiconductor counters; sputtering; Li-diffused; RF sputtering; Schottky barrier contacts; amorphous Ge; blocking behavior; high-purity Ge crystals; high-purity Ge radiation detectors; ion-implanted; low leakage currents; multi-electrode detectors; p-type; processing steps; sputtered a-Ge films; thin dead layers; voltage polarity; Amorphous materials; Contacts; Crystals; Fabrication; Leakage current; Radiation detectors; Radio frequency; Schottky barriers; Sputtering; Voltage;
Journal_Title :
Nuclear Science, IEEE Transactions on