Title :
Velocity Distribution of
Ions in Low Temperature Hydrogen Plasma
Author :
Diomede, Paola ; Longo, Savino
Author_Institution :
Dept. of Chem., Bari Univ., Bari
Abstract :
A Monte Carlo solution of the Boltzmann equation is applied to the calculation of the velocity distribution of negative atomic ions H- in uniform H/H2 plasmas in a wide parameter range. Results are shown for the energy distribution n(epsiv), the 2-D velocity distribution, and the energy-dependent coefficients of the spherical harmonics expansion of its angular part, for different values of the reduced electric field E/N, the atomic fraction, and the H+ mole fraction. By increasing E/N or the atomic fraction at constant ion energy, the velocity distribution becomes highly anisotropic, and at same time, n(epsiv) features a suprathermal tail consistent with analytical results.
Keywords :
Boltzmann equation; Monte Carlo methods; hydrogen ions; negative ions; plasma collision processes; plasma simulation; plasma transport processes; Boltzmann equation; H2; H-; Monte Carlo solution; collision processes; low temperature hydrogen plasma; negative atomic ions; spherical harmonic expansion; velocity distribution; Anisotropic magnetoresistance; Electrons; Hydrogen; Monte Carlo methods; Plasma chemistry; Plasma materials processing; Plasma temperature; Plasma transport processes; Production; Temperature distribution; Ion transport; Monte Carlo (MC) methods; negative ions; spherical harmonics expansion;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.927273