• DocumentCode
    833210
  • Title

    Electronegative Plasma Structure

  • Author

    Goeckner, Matthew J. ; Nelson, Caleb T. ; Overzet, Lawrence J.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    996
  • Lastpage
    997
  • Abstract
    It is well understood that simply changing the feed gas from an electropositive to electronegative gas can result in a substantially different discharge structure. We find that the electron pressure (or energy density) can visibly vary for discharges with significant electron attachment, whereas it is much more uniform for electropositive glows. Such structure in the electron energy density is difficult to measure by using other experimental diagnostics; however, it is relatively easy to see by visual inspection.
  • Keywords
    electron attachment; electron density; electronegativity; glow discharges; plasma density; plasma diagnostics; discharge structure; electron attachment; electron energy density; electron pressure; electronegative gas; electropositive gas; electropositive glows; plasma glow; plasma measurements; plasma pressure; plasma properties; plasma structure; Electron emission; Fault location; Plasma confinement; Plasma density; Plasma diagnostics; Plasma measurements; Plasma properties; Plasma sources; Plasma temperature; Tellurium; Plasma glow; plasma measurements; plasma pressure; plasma properties; plasma structure;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.922486
  • Filename
    4598999