DocumentCode :
833210
Title :
Electronegative Plasma Structure
Author :
Goeckner, Matthew J. ; Nelson, Caleb T. ; Overzet, Lawrence J.
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX
Volume :
36
Issue :
4
fYear :
2008
Firstpage :
996
Lastpage :
997
Abstract :
It is well understood that simply changing the feed gas from an electropositive to electronegative gas can result in a substantially different discharge structure. We find that the electron pressure (or energy density) can visibly vary for discharges with significant electron attachment, whereas it is much more uniform for electropositive glows. Such structure in the electron energy density is difficult to measure by using other experimental diagnostics; however, it is relatively easy to see by visual inspection.
Keywords :
electron attachment; electron density; electronegativity; glow discharges; plasma density; plasma diagnostics; discharge structure; electron attachment; electron energy density; electron pressure; electronegative gas; electropositive gas; electropositive glows; plasma glow; plasma measurements; plasma pressure; plasma properties; plasma structure; Electron emission; Fault location; Plasma confinement; Plasma density; Plasma diagnostics; Plasma measurements; Plasma properties; Plasma sources; Plasma temperature; Tellurium; Plasma glow; plasma measurements; plasma pressure; plasma properties; plasma structure;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2008.922486
Filename :
4598999
Link To Document :
بازگشت