DocumentCode
833210
Title
Electronegative Plasma Structure
Author
Goeckner, Matthew J. ; Nelson, Caleb T. ; Overzet, Lawrence J.
Author_Institution
Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX
Volume
36
Issue
4
fYear
2008
Firstpage
996
Lastpage
997
Abstract
It is well understood that simply changing the feed gas from an electropositive to electronegative gas can result in a substantially different discharge structure. We find that the electron pressure (or energy density) can visibly vary for discharges with significant electron attachment, whereas it is much more uniform for electropositive glows. Such structure in the electron energy density is difficult to measure by using other experimental diagnostics; however, it is relatively easy to see by visual inspection.
Keywords
electron attachment; electron density; electronegativity; glow discharges; plasma density; plasma diagnostics; discharge structure; electron attachment; electron energy density; electron pressure; electronegative gas; electropositive gas; electropositive glows; plasma glow; plasma measurements; plasma pressure; plasma properties; plasma structure; Electron emission; Fault location; Plasma confinement; Plasma density; Plasma diagnostics; Plasma measurements; Plasma properties; Plasma sources; Plasma temperature; Tellurium; Plasma glow; plasma measurements; plasma pressure; plasma properties; plasma structure;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2008.922486
Filename
4598999
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