Title :
Nanotip-Enhanced Microplasma Devices
Author_Institution :
Nat. Chiao Tung Univ., Hsinchu
Abstract :
Nanotip-enhanced microplasma devices have been successfully fabricated and operated with neon gas at room temperature. The panel-type microplasma device included nanotip and metal electrodes on the rear panel, which provided low discharge voltage, strong emission, and stable discharge phenomena. The nanotip with a radius below 10 nm enhances the electrical field distribution density. The electrical properties of neon discharges have been examined with pulsed waveforms from 2 to 20 kHz in neon with pressures from 4 times 104 to 105 Pa.
Keywords :
glow discharges; neon; plasma devices; Ne2; electric field distribution density; frequency 2 kHz to 20 kHz; metal electrodes; nanotip enhanced microplasma devices; neon discharge electrical properties; neon plasma; panel type microplasma device; pressure 40000 Pa to 100000 Pa; pulsed waveforms; stable discharge phenomena; temperature 293 K to 298 K; Charge coupled devices; Chromium; Electrodes; Frequency; Glow discharges; Indium tin oxide; Liquid crystal displays; Low voltage; Nanoscale devices; Temperature; Microdischarge; nanotips;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.922941
