Title :
Simple two-dimensional numerical solution method for SAW-semiconductor device simulations
Author :
Haartsen, J.C. ; Venema, A.
Author_Institution :
Delft Univ. of Technol., Netherlands
fDate :
3/30/1989 12:00:00 AM
Abstract :
A computational technique to determine the electrical properties of SAW-semiconductor devices is presented. The contribution of the acoustic waves is reduced to a surface charge at the interface between the piezoelectric layer and the semiconducting substrate. In this way the electrical problem can be solved with numerical techniques commonly used for device modelling.
Keywords :
numerical methods; semiconductor device models; surface acoustic wave devices; SAW-semiconductor devices; computational technique; device modelling; electrical properties; numerical techniques; piezoelectric layer; surface charge; two-dimensional numerical solution method;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19890320
