DocumentCode :
833627
Title :
Simulation and Visualization of Self-Assembled Nanodevice Networks Synthesized via Plasma–Surface Interaction
Author :
Levchenko, Igor ; Ostrikov, Kostya ; Cvelbar, Uros
Author_Institution :
Sch. of Phys., Sydney Univ., Sydney, NSW
Volume :
36
Issue :
4
fYear :
2008
Firstpage :
866
Lastpage :
867
Abstract :
Using advanced visualization techniques, a comprehensive visualization of all the stages of the self-organized growth of internetworked nanostructures on plasma-exposed surface has been made. Atomistic kinetic Monte Carlo simulation for the initial stage of deposition, with 3-D visualization of the whole system and half-tone visualization of the density field of the adsorbed atoms, makes it possible to implement a multiscale predictive modeling of the development of the nanoscale system.
Keywords :
Monte Carlo methods; nanoelectronics; plasma interactions; plasma simulation; self-assembly; Monte Carlo simulation; nanostructures; plasma-surface interaction; self-assembled nanodevice networks synthesis; Atomic layer deposition; Internet; Kinetic theory; Nanostructures; Network synthesis; Plasma density; Plasma simulation; Predictive models; Self-assembly; Visualization; Nanodevice; plasma–surface interaction; self-assembly;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2008.924408
Filename :
4599037
Link To Document :
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