Title :
Radio-Frequency Glow Discharges of Different Gases Using Bare Metallic Electrodes at Atmospheric Pressure
Author :
Li, He-Ping ; Li, Guo ; Wang, Sen ; Le, Pei-Si ; Bao, Cheng-Yu
Author_Institution :
Dept. of Eng. Phys., Tsinghua Univ., Beijing
Abstract :
The images of the atmospheric-pressure glow discharges driven by the radio-frequency power supply using He, Ar, N2, O2, air, or their mixture as the primary plasma-working gas are presented in this paper. The plasma jet, produced using the planar-type plasma generator behaving like a "brush", is useful for the effective treatment of different materials exposed to the plasma jet.
Keywords :
air; argon; gas mixtures; glow discharges; helium; high-frequency discharges; nitrogen; oxygen; plasma jets; plasma sources; Ar; He; N2; O2; air; atmospheric pressure; bare metallic electrodes; mixture; planar-type plasma generator; plasma jet; pressure 1 atm; primary plasma-working gas; radio-frequency glow discharges; Argon; Atmospheric-pressure plasmas; Brushes; Electrodes; Gases; Glow discharges; Helium; Plasma materials processing; Power supplies; Radio frequency; Atmospheric-pressure glow discharge; plasma jet; radio frequency (RF);
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.925709
