Title :
Simultaneous thickness and group index measurement using optical low-coherence reflectometry
Author :
Sorin, W.V. ; Gray, D.F.
Author_Institution :
Hewlett-Packard Lab., Palo Alto, CA, USA
Abstract :
Using high-resolution optical reflectometry, group index and physical thickness can both be determined by precisely measuring optical time delays through a sample. Optical low-coherence reflectometry offers both the high-spatial resolution and large dynamic range required to perform accurate measurements using this technique.<>
Keywords :
light coherence; optical resolving power; reflectometry; refractive index measurement; thickness measurement; accurate measurements; group index measurement; high-resolution optical reflectometry; high-spatial resolution; large dynamic range; low-coherence reflectometry; optical low-coherence reflectometry; optical time delays; refractive index measurement; thickness measurement; Electron optics; Gallium arsenide; HEMTs; Mirrors; Optical control; Optical devices; Optical interferometry; Optical mixing; Reflectometry; Thickness measurement;
Journal_Title :
Photonics Technology Letters, IEEE
