Title :
Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system
Author :
Tsukamoto, A. ; Saitoh, K. ; Yokosawa, K. ; Suzuki, D. ; Seki, Y. ; Kandori, A. ; Tsukada, K.
Author_Institution :
Adv. Res. Lab., Hitachi Ltd., Tokyo, Japan
fDate :
6/1/2005 12:00:00 AM
Abstract :
We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.
Keywords :
SQUID magnetometers; barium compounds; biomedical equipment; high-temperature superconductors; magnetic field measurement; magnetocardiography; pulsed laser deposition; superconducting thin films; yttrium compounds; 51-channel HTS MCG system; YBCO SQUIDs fabrication; YBCO deposition; YBCO thin films; YBa2Cu3O7; clinical testing; magnetocardiogram; magnetometer pattern; pulsed laser deposition technique; Coils; High temperature superconductors; Optical design; Optical device fabrication; Optical pulses; Pulsed laser deposition; SQUID magnetometers; Sputtering; Throughput; Yttrium barium copper oxide; Fabrication throughput; HTS SQUID; PLD; magnetocardiogram;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2005.849741
