Title :
Fabrication of Mo/Cu multilayer and bilayer transition edge sensors
Author :
Ali, Z.A. ; Drury, O.B. ; Cunningham, M.F. ; Chesser, J.M. ; Barbee, T.W., Jr. ; Friedrich, S.
Author_Institution :
Lawrence Livermore Nat. Lab., CA, USA
fDate :
6/1/2005 12:00:00 AM
Abstract :
We are developing cryogenic high-resolution X-ray, Gamma-ray and neutron spectrometers based on superconducting Mo/Cu transition edge sensors. Here we discuss the sensor design for different applications, present the photolithographic fabrication techniques, and outline future detector development to increase the spectrometer sensitivity.
Keywords :
X-ray spectrometers; copper; gamma-ray spectrometers; molybdenum; multilayers; neutron spectrometers; photolithography; superconducting particle detectors; superconducting thin films; Mo-Cu; bilayer transition edge sensors; cryogenic high-resolution X-ray spectrometers; cryogenic high-resolution gamma-ray spectrometers; cryogenic high-resolution neutron spectrometers; device fabrication; multilayers; photolithographic fabrication techniques; superconducting transition edge sensors; Energy resolution; Fabrication; Gamma ray detectors; Neutrons; Nonhomogeneous media; Spectroscopy; Superconducting materials; Superconducting photodetectors; Temperature sensors; Thermal conductivity; Device fabrication; Mo/Cu multilayers; gamma-ray spectrometers; superconducting transition edge sensors; x-ray spectrometers;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2005.849897
