Title :
High-efficiency, high-speed VCSELs with deep oxidation layers
Author :
Chang, Y.-C. ; Wang, C.S. ; Johansson, L.A. ; Coldren, L.A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, CA
Abstract :
A novel method to reduce the parasitics of vertical-cavity surface-emitting lasers (VCSELs) using deep oxidation layers is proposed. Using this method, high-efficiency, high-speed 980 nm, tapered-aperture VCSELs with a -3 dB frequency of 17.9 GHz, the highest bandwidth without using proton implantation, are demonstrated
Keywords :
high-speed optical techniques; oxidation; surface emitting lasers; 17.9 GHz; 980 micron; deep oxidation layers; vertical-cavity surface-emitting lasers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20062538
