Title :
Fabrication development for nanowire GHz-counting-rate single-photon detectors
Author :
Yang, Joel K.W. ; Dauler, Eric ; Ferri, Antonin ; Pearlman, Aaron ; Verevkin, Aleksandr ; Gol´tsman, Gregory ; Voronov, Boris ; Sobolewski, Roman ; Keicher, William E. ; Berggren, Karl K.
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
fDate :
6/1/2005 12:00:00 AM
Abstract :
We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.
Keywords :
counters; electron resists; microwave detectors; nanopatterning; nanowires; niobium compounds; photon counting; superconducting epitaxial layers; superconducting microwave devices; superconducting particle detectors; HSQ-based process; NbN; device patterning; epitaxial niobium-nitride thin films; hydrogen silsesquioxane negative-tone spin-on-glass resist; nanowire GHz-counting-rate single-photon detectors; nanowire detectors; standard polymethyl-methacrylate organic positive-tone electron-beam resist; superconductive single-photon detectors; Fabrication; Hydrogen; Infrared detectors; Nanostructures; Optical fiber communication; Photodetectors; Resists; Superconducting films; Superconductivity; Testing; Epitaxial niobium-nitride thin films; hydrogen silsesquioxane electron-beam resist; superconductive single-photon detectors;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2005.849971
