DocumentCode :
835404
Title :
Rare-earth-doped GaN: growth, properties, and fabrication of electroluminescent devices
Author :
Steckl, Andrew J. ; Heikenfeld, Jason C. ; Lee, Dong-Seon ; Garter, Michael J. ; Baker, Christopher C. ; Wang, Yongqiang ; Jones, Robert
Author_Institution :
Nanoelectronics Lab., Cincinnati Univ., OH, USA
Volume :
8
Issue :
4
fYear :
2002
Firstpage :
749
Lastpage :
766
Abstract :
A review is presented of the fabrication, operation, and applications of rare-earth-doped GaN electroluminescent devices (ELDs). GaN:RE ELDs emit light due to impact excitation of the rare earth (RE) ions by hot carriers followed by radiative RE relaxation. By appropriately choosing the RE dopant, narrow linewidth emission can be obtained at selected wavelengths from the ultraviolet to the infrared. The deposition of GaN:RE layers is carried out by solid-source molecular beam epitaxy, and a plasma N2 source. Growth mechanisms and optimization of the GaN layers for RE emission are discussed based on RE concentration, growth temperature, and V/III ratio. The fabrication processes and electrical models for both dc- and ac-biased devices are discussed, along with techniques for multicolor integration. Visible emission at red, green, and blue wavelengths from GaN doped with Eu, Er, and Tm has led to the development of flat-panel display (FPD) devices. The brightness characteristics of thick dielectric EL (TDEL) display devices are reviewed as a function of bias, frequency, and time. High contrast TDEL devices using a black dielectric are presented. The fabrication and operation of FPD prototypes are described. Infrared emission at 1.5 μm from GaN:Er ELDs has been applied to optical telecommunications devices. The fabrication of GaN channel waveguides by inductively coupled plasma etching is also reviewed, along with waveguide optical characterization.
Keywords :
III-V semiconductors; brightness; electroluminescence; electroluminescent devices; electroluminescent displays; erbium; europium; flat panel displays; gallium compounds; molecular beam epitaxial growth; optical waveguides; reviews; semiconductor growth; sputter etching; thulium; wide band gap semiconductors; GaN channel waveguides; GaN:Er; GaN:Eu; GaN:Tm; ac-biased devices; black dielectric; brightness characteristics; dc-biased devices; electrical models; flat-panel display devices; growth mechanisms; growth temperature; high contrast TDEL devices; hot carriers; inductively coupled plasma etching; infrared emission; multicolor integration; narrow linewidth emission; optical telecommunications devices; plasma N2 source; radiative relaxation; rare earth ion impact excitation; rare-earth-doped GaN electroluminescent devices; review; solid-source molecular beam epitaxy; thick dielectric EL display devices; visible emission; waveguide optical characterization; Dielectric devices; Displays; Electroluminescent devices; Fabrication; Gallium nitride; Optical waveguides; Plasma applications; Plasma devices; Plasma temperature; Plasma waves;
fLanguage :
English
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
1077-260X
Type :
jour
DOI :
10.1109/JSTQE.2002.801690
Filename :
1039467
Link To Document :
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