Title :
Monolithic Silicon Waveguides in Standard Silicon
Author :
Chia-Ming Chang ; Solgaard, Olav
Abstract :
A methodology allows fabrication of silicon-photonic devices in standard silicon wafers, eliminating the need for silicon-on-insulator (SOI) wafers. Using this technology, the authors demonstrate low-loss silicon waveguides (2.34 dB/cm), comparable to conventional SOI channel waveguides. The ease and flexibility of this fabrication method simplify integration of electronics and photonics and make it a possible alternative to SOI-based technology for implementation of silicon-photonic devices and systems.
Keywords :
elemental semiconductors; silicon-on-insulator; waveguides; SOI channel waveguides; SOI wafers; Si; low-loss silicon waveguides; monolithic silicon waveguides; silicon-on-insulator wafers; silicon-photonic device fabrication; standard silicon wafers; Annealing; Optical interconnections; Optical waveguides; Photonic devices; Photonics; Silicon; Substrates; Waveguide components; integrated optics devices; optical interconnects; silicon photonics; waveguides;
Journal_Title :
Micro, IEEE
