Title : 
Structural Optimization of Silicon-On-Insulator Slot Waveguides
         
        
            Author : 
Mullner, P. ; Hainberger, Rainer
         
        
            Author_Institution : 
ARC Seibersdorf Res. GmbH, Vienna
         
        
        
        
        
        
        
            Abstract : 
In this letter, we theoretically investigate the potential for further improvement of the slot waveguide structure in silicon-on-insulator at a wavelength of 1550 nm. Waveguide thickness and width, as well as slot thickness are optimized with respect to the optical power confined in the slot region by taking into account the modal behavior of the structure. A single-mode criterion is defined as a function of the geometry parameters
         
        
            Keywords : 
integrated optics; optical waveguides; silicon-on-insulator; 1550 nm; Si-SiO2; modal behavior; silicon-on-insulator; single-mode criterion; slot thickness; slot waveguides; structural optimization; Conductors; Geometrical optics; Optical sensors; Optical surface waves; Optical waveguide theory; Optical waveguides; Photonics; Semiconductor waveguides; Silicon on insulator technology; Wires; Optical waveguides; silicon photonics; single-mode criterion;
         
        
        
            Journal_Title : 
Photonics Technology Letters, IEEE
         
        
        
        
        
            DOI : 
10.1109/LPT.2006.886974