Unidirectional SAW transducer for gigahertz frequencies

Author

Lehtonen, Saku ; Plessky, Victor P. ; Hartmann, Clinton S. ; Salomaa, Martti M.

Author_Institution

Mater. Phys. Lab., Helsinki Univ. of Technol., Hut, Finland

Volume

50

Issue

11

fYear

2003

Firstpage

1404

Lastpage

1406

Abstract

A single-phase unidirectional transducer (SPUDT) structure using /spl lambda//4 and wider electrodes is introduced. The considerable difference between the reflectivity of short-circuited /spl lambda//4 electrodes and that of floating /spl lambda//2-wide electrodes on 128/spl deg/ lithium niobate (LiNbO/sub 3/) is exploited. The surface acoustic wave (SAW) device operating at 2.45 GHz has critical dimensions of about 0.4 /spl mu/m, accessible for standard optical lithography.

Keywords

lithium compounds; reflectivity; surface acoustic wave transducers; 0.4 micron; 2.45 GHz; LiNbO/sub 3/; SPUDT; floating /spl lambda//2 wide electrodes; gigahertz frequencies; reflectivity; short circuited /spl lambda//4 electrodes; single phase unidirectional SAW transducer; surface acoustic wave device; Acoustic transducers; Acoustic waves; Electrodes; Frequency; Lithium niobate; Optical devices; Optical surface waves; Reflectivity; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2003.1251122

Filename

1251122