Title :
Electrothermally tunable two-chip optical filter with very low-cost and simple concept
Author :
Halbritter, H. ; Aziz, M. ; Riemenschneider, E. ; Meissner, P.
Author_Institution :
Inst. fur Hochfrequenztech., Technische Univ. Darmstadt, Germany
fDate :
9/26/2002 12:00:00 AM
Abstract :
A simple and very low-cost two-chip concept for the fabrication of an electrothermally tunable optical filter is presented. The novel realisation promises to be very attractive as it combines two important features, an optimised low-cost manufacturing and assembly process with high performance filter and tuning characteristics in terms of insertion loss, tuning range and dynamic behaviour
Keywords :
membranes; micro-optics; micromachining; optical communication equipment; optical fabrication; optical filters; optical tuning; wavelength division multiplexing; bulk-micromachined device; dense WDM systems; dense wavelength division multiplexing; dynamic behaviour; electrothermally tunable optical filter; high performance filter characteristics; high performance tuning characteristics; insertion loss; low-cost two-chip concept; mirror membrane; optimised assembly process; optimised low-cost manufacturing process; stable plane-concave microcavity; transmission characteristics; tuning range;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20020789
