Title :
Fabrication of coated conductors by multiple-stage CVD
Author :
Kashima, Naoji ; Niwa, Toshiharu ; Mori, Masami ; Nagaya, Shigeo ; Muroga, Takemi ; Miyata, Seiki ; Watanabe, Tomonori ; Yamada, Yutaka ; Izumi, Teruo ; Shiohara, Yuh
Author_Institution :
Chubu Electr. Power Co., Nagoya, Japan
fDate :
6/1/2005 12:00:00 AM
Abstract :
The multiple-stage Chemical Vapor Deposition technique was developed for making a long coated conductor with high deposition speed. In this paper, a multi-coating of YBCO layer using 6-stage CVD system was described. Substrates were PLD-CeO2/IBAD-Gd2Zr2O7/Hastelloy. Thickness of each layer was about 1.0 μm, 1.0 μm and 0.1 mm respectively. Δφ of CeO2 layer was about 9-10°. Deposition rate of YBCO layer was 25 m/h and 5 m/h. Number of passing was 10 times and 2 times respectively. Ic of the tape which was prepared at a speed of 25 m/h × 10 passes was 100 A/cm. Thickness of total YBCO layer was about 1 μm and its Jc was 1 MA/cm2. Ic of the tape which was prepared at a speed of 5 m/h × 2 passes was 101 A/cm. Thickness of total YBCO layer was also 1 μm and its Jc was 1 MA/cm2.
Keywords :
CVD coatings; barium compounds; buffer layers; cerium compounds; critical current density (superconductivity); gadolinium compounds; high-temperature superconductors; ion beam assisted deposition; pulsed laser deposition; substrates; superconducting tapes; yttrium compounds; 6-stage CVD system; Hastelloy; IBAD; PLD; YBa2Cu3O7; chemical vapor deposition technique; coated conductors fabrication; deposition rate; multi-coating; multiple-stage CVD; Conducting materials; Conductors; Fabrication; Inductors; Magnetic materials; Superconducting films; Superconducting magnets; Superconducting materials; Superconductivity; Yttrium barium copper oxide; Coated conductor; MOCVD; YBCO; multiple-stage CVD;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2005.847773
