Title :
An acoustic micrometer and its application to layer thickness measurements
Author :
Tsukahara, Yusuke ; Nakaso, Noritaka ; Kushibiki, Jun-ichi ; Chubachi, Noriyoshi
Author_Institution :
Toppan Printing Co. Ltd., Saitama, Japan
fDate :
5/1/1989 12:00:00 AM
Abstract :
The principle and system of the acoustic micrometer are described. Its basic performance, with respect to the stability, accuracy, spatial resolution, and temperature dependence, is also discussed. Gold layers electroplated on substrates of 42% Ni-Fe alloy were taken as test specimens in the present study. The measurable range of the thickness for gold layers covered from 1 to 20 mu m when a frequency range of 10-200 MHz was used. Stability and accuracy were achieved to within +or-0.2% and +or-1%, respectively.<>
Keywords :
micrometry; thickness measurement; ultrasonic equipment; ultrasonic measurement; 1 to 20 micron; 10 to 200 MHz; Ni-Fe alloy; acoustic micrometer; layer thickness measurements; ultrasonic equipment; Acoustic applications; Acoustic measurements; Acoustic propagation; Frequency; Production; Spatial resolution; Stability; Surface acoustic waves; Thickness measurement; Ultrasonic variables measurement;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
