Title :
Metal organic deposition of epitaxial Y123 films using a low-cost vacuum technique
Author :
Yamaguchi, Iwao ; Manabe, Takaaki ; Sohma, Mitsugu ; Tsukada, Kenichi ; Kondo, Wakichi ; Kamiya, Kunio ; Mizuta, Susumu ; Kumagai, Toshiya
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan
fDate :
6/1/2005 12:00:00 AM
Abstract :
Epitaxial YBa2Cu3O7 (Y123) films were obtained by metal-organic deposition (MOD) using a simple, low-cost vacuum technique without gas flowing. The total pressure and oxygen partial pressure in the furnace were controlled to be 10 kPa and 10 Pa, respectively, by evacuation with a rotary pump followed by refilling with a mixture of O2 and N2 (O2 content: 1000 ppm). XRD analyses exhibited that c-axis-oriented epitaxial Y123 films have successfully been obtained on CeO2-buffered YSZ (100) (CbZ) and CeO2-buffered sapphire (012) (CbS) substrates. In-plane alignments of these films were as high as that of the CeO2 buffer layer. The film on the CbZ demonstrated a high critical current density Jc of ∼2.1 MA/cm2 at 77 K all over the film; the fluctuation of Jc being within ±10% of the average. Inductive Tc measurement showed a very sharp peak with Tc=90.5 K. Inductive-Jc and Tc of the Y123 film on CbS were 1.1 MA/cm2 and 89.6 K, respectively, whereas the Tc of the Y123 film on LaAlO3 was lower than 77 K owing to the occurrence of the a-axis grains.
Keywords :
barium compounds; cerium compounds; critical current density (superconductivity); epitaxial layers; high-temperature superconductors; organic superconductors; sapphire; substrates; superconducting thin films; vacuum deposition; yttrium compounds; 10 Pa; 10 kPa; CeO2; LaAlO3; XRD analyses; YBa2Cu3O7; a-axis grains; c-axis-oriented epitaxial Y123 films; critical current density; gas flowing; in-plane alignments; low-cost vacuum technique; metal organic deposition; oxygen partial pressure; rotary pump; Chemical processes; Costs; Furnaces; Heat treatment; Pressure control; Production; Substrates; Superconducting films; Temperature; Vacuum technology; Critical current density; epitaxial Y123 film; metal-organic deposition; vacuum;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2005.848645