Title :
Surface roughness of magnesium oxide buffer layers grown by inclined substrate deposition
Author :
Koritala, Rachel E. ; Ma, Beihai ; Miller, Dean J. ; Uprety, Krishna K. ; Fisher, Brandon L. ; Balachandran, U.
Author_Institution :
Energy Technol. Div., Argonne Nat. Lab., IL, USA
fDate :
6/1/2005 12:00:00 AM
Abstract :
Biaxially textured MgO films were grown by inclined substrate deposition (ISD) as template layers for YBa2Cu3O7-x (YBCO)-coated conductors. The surface roughness of films deposited at different angles and with varying thickness was examined by atomic force microscopy. Results were correlated with the texture, measured by X-ray diffraction, to determine the optimal thickness and deposition angle.
Keywords :
X-ray diffraction; atomic force microscopy; barium compounds; buffer layers; electron beam deposition; high-temperature superconductors; magnesium compounds; superconducting thin films; surface roughness; yttrium compounds; ISD; MgO; X-ray diffraction; YBCO coated conductors; YBa2Cu3O7; atomic force microscopy; deposition angle; inclined substrate deposition; magnesium oxide buffer layers; optimal thickness; superconducting film; surface roughness; template layers; Atomic force microscopy; Atomic layer deposition; Atomic measurements; Buffer layers; Conductive films; Magnesium oxide; Rough surfaces; Surface roughness; Thickness measurement; X-ray diffraction; Buffer layers; inclined substrate deposition; roughness; superconducting films;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2005.848712
