Title :
Thin-film characterization using a scanning laser acoustic microscope with surface acoustic waves
Author :
Robbins, William P. ; Mueller, Rolf K. ; Rudd, Eric
Author_Institution :
Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA
fDate :
7/1/1988 12:00:00 AM
Abstract :
The use of surface acoustic waves in a scanning laser acoustic microscope for the characterization of the mechanical or acoustic properties of thin films deposited on piezoelectric substrates is demonstrated. Quantitative measurements of mass loading effects of 5000-AA-thick tungsten films deposited on lithium niobate substrates were obtained using 100-MHz surface acoustic waves. No information about the tungsten film could be obtained using 100-MHz compressional waves. Methods of generating surface waves on nonpiezoelectric materials so that this technique could be used on arbitrary substrates are discussed.<>
Keywords :
acoustic microscopy; laser beam applications; photoacoustic effect; surface acoustic waves; 100 MHz; 500 nm; LiNbO/sub 3/; W; compressional waves; mass loading; piezoelectric substrates; scanning laser acoustic microscope; surface acoustic waves; thin films; Acoustic waves; Mechanical factors; Microscopy; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Surface emitting lasers; Transistors; Tungsten;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
