Title :
Changes of surface-acoustic-wave velocity on Z-cut LiTaO3 substrate by proton exchange and post-exchange annealing
Author :
Chubachi, N. ; Sannomiya, T.
Abstract :
The velocity of leaky surface-acoustic-waves (LSAWs) on proton-exchanged and annealed proton-exchanged Z-cut LiTaO3 substrates was measured by line-focus-beam (LFB) acoustic microscopy. It is revealed that the LSAW velocity is decreased from 3220 to 3000 m/s by proton exchange and that post-exchange annealing effects some recovery to the decreased velocity.
Keywords :
acoustic microscopy; annealing; ion exchange; lithium compounds; substrates; surface acoustic waves; ultrasonic velocity; LSAW velocity; LiTaO 3 substrates; Z-cut substrate; leaky SAWs; line focus beam acoustic microscopy; post-exchange annealing; proton exchange; surface-acoustic-wave velocity;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19921484
