• DocumentCode
    842594
  • Title

    Changes of surface-acoustic-wave velocity on Z-cut LiTaO3 substrate by proton exchange and post-exchange annealing

  • Author

    Chubachi, N. ; Sannomiya, T.

  • Volume
    28
  • Issue
    25
  • fYear
    1992
  • Firstpage
    2306
  • Lastpage
    2308
  • Abstract
    The velocity of leaky surface-acoustic-waves (LSAWs) on proton-exchanged and annealed proton-exchanged Z-cut LiTaO3 substrates was measured by line-focus-beam (LFB) acoustic microscopy. It is revealed that the LSAW velocity is decreased from 3220 to 3000 m/s by proton exchange and that post-exchange annealing effects some recovery to the decreased velocity.
  • Keywords
    acoustic microscopy; annealing; ion exchange; lithium compounds; substrates; surface acoustic waves; ultrasonic velocity; LSAW velocity; LiTaO 3 substrates; Z-cut substrate; leaky SAWs; line focus beam acoustic microscopy; post-exchange annealing; proton exchange; surface-acoustic-wave velocity;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19921484
  • Filename
    191842
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=842594