• DocumentCode
    843390
  • Title

    Angular Effects in the Sputtering of Stainless Steel by Hydrogen Ions

  • Author

    Smith, Joe N., Jr.

  • Author_Institution
    General Atomic Company San Diego, California 92138
  • Volume
    26
  • Issue
    1
  • fYear
    1979
  • Firstpage
    1292
  • Lastpage
    1295
  • Abstract
    One major source of plasma contamination in tokamaks results from sputtering of the first wall of the plasma chamber by hydrogenic species. Charge transfer neutrals and escaping ions will have different incident angle distributions and it is therefore important to study the angular behavior of the sputtering mechanism. Laboratory experiments are reported in which the angular and energy distribution of Cr+ sputtered from 304 stainless steel by H+3 is measured as a function of angle of incidence of the H+3 beam. A change in both the angular distribution and the energy distribution is observed toward grazing incidence, which is taken as evidence of the increasing contribution of surface recoils. The effects of surface contamination on the yield, angular distribution, and energy distribution of sputtered ions are also reported.
  • Keywords
    Charge transfer; Energy measurement; Hydrogen; Laboratories; Plasma sources; Pollution measurement; Sputtering; Steel; Surface contamination; Tokamaks;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1979.4330371
  • Filename
    4330371