DocumentCode
843390
Title
Angular Effects in the Sputtering of Stainless Steel by Hydrogen Ions
Author
Smith, Joe N., Jr.
Author_Institution
General Atomic Company San Diego, California 92138
Volume
26
Issue
1
fYear
1979
Firstpage
1292
Lastpage
1295
Abstract
One major source of plasma contamination in tokamaks results from sputtering of the first wall of the plasma chamber by hydrogenic species. Charge transfer neutrals and escaping ions will have different incident angle distributions and it is therefore important to study the angular behavior of the sputtering mechanism. Laboratory experiments are reported in which the angular and energy distribution of Cr+ sputtered from 304 stainless steel by H+3 is measured as a function of angle of incidence of the H+3 beam. A change in both the angular distribution and the energy distribution is observed toward grazing incidence, which is taken as evidence of the increasing contribution of surface recoils. The effects of surface contamination on the yield, angular distribution, and energy distribution of sputtered ions are also reported.
Keywords
Charge transfer; Energy measurement; Hydrogen; Laboratories; Plasma sources; Pollution measurement; Sputtering; Steel; Surface contamination; Tokamaks;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1979.4330371
Filename
4330371
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