• DocumentCode
    843426
  • Title

    An RF-MEMS Switch With Low-Actuation Voltage and High Reliability

  • Author

    Lee, Seong-Dae ; Jun, Byoung-Chul ; Kim, Sam-Dong ; Park, Hyun-Chang ; Rhee, Jin-Koo ; Mizuno, Koji

  • Author_Institution
    Millimeter-Wave Innovation Technol. Res. Center, Dongguk Univ., Seoul
  • Volume
    15
  • Issue
    6
  • fYear
    2006
  • Firstpage
    1605
  • Lastpage
    1611
  • Abstract
    "Both the authors and the Editor-in-Chief of Volume 15, number 6 of the IEEE/ASME JMEMS (December 2006, pp.1606-1611) of the paper numbered JMEMS 1743 have agreed that this paper, "An RF MEMS Switch with Low Actuation Voltage and High Reliability," should not have been published. The paper would have been withdrawn had this fact been discovered before the IEEE/ASME JMEMS print date for December 2006. The authors have indicated that they will work to provide a new version their paper that will be considered for publication if it is submitted in the future. For help in coming to this decision, I would like to thank those concerned individuals, including the authors, JMEMS editors, and highly respected researchers in the MEMS and microwave communities who contributed their time and consideration to help us assure the integrity of our journal." Richard S. Muller, Editor-in-Chief, IEEE/ASME JMEMS
  • Keywords
    elastic deformation; electrostatic actuators; microswitches; microwave switches; 0.5 dB; 0.59 dB; 120 ns; 130 ns; 4.5 V; 50 GHz; RF-MEMS switch; actuation energy; bridge contact pad structures; cold switching; elastic deformation; electrostatic actuation; electrostatically actuated suspended beam; freely moving contact pad; guard poles; radiofrequency microelectromechanical systems switch; Contacts; Electrodes; Insertion loss; Microelectromechanical systems; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Structural beams; Switches; Voltage; Freely moving; long-term lifetime; low-actuation voltage; microelectromechanical system (MEMS) switch; movable lower contact pad;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2006.886394
  • Filename
    4020294