Title :
The Range of 120 keV Ions in Solids
Author :
Santry, D.C. ; Werner, R.D. ; Westcott, O.M.
Author_Institution :
Atomic Energy of Canada Limited, Chalk River, Ontario, Canada KOJ 1JO
Abstract :
A variety of heavy ions covering the mass range 24Mg to 209Bi were implanted at 120 keV using an electromagnetic isotope separator. Depth profiles of the implanted ions in thick targets of Be, C, A1 and Si were measured by He ion backscattering analysis. The measured range and range straggling of heavy ions were found to be in reasonable agreement with theory.
Keywords :
Apertures; Backscatter; Detectors; Energy resolution; Helium; Implants; Rough surfaces; Solid state circuits; Surface roughness; Surface topography;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1979.4330381
