Title :
CF4 decompositions using streamer- and glow-mode in dielectric barrier discharges
Author :
Kim, Yongho ; Kim, Kwan-Tae ; Cha, Min Suk ; Song, Young-Hoon ; Kim, Seock Joon
Author_Institution :
Korea Inst. of Machinery & Mater., Daejeon, South Korea
fDate :
6/1/2005 12:00:00 AM
Abstract :
A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF4) because the DBD has been successfully used for generating ozone (O3) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF4 decompositions was investigated and the optimum oxygen concentrations were found. We compared N2-streamer, N2-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF4 removal. The results showed that the most efficient CF4 removal was obtained in He-glow mode, while N2-streamer and N2-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF4 removal efficiency compared to the normal N2-streamer mode.
Keywords :
dissociation; glow discharges; helium; nitrogen; organic compounds; plasma applications; plasma chemistry; 10 kHz; He; N2; carbon tetrafluoride decompositions; carbon tetrafluoride removal efficiency; coaxial cylinder reactor; dielectric barrier discharges; glow discharge; plasma mode; streamer discharge; Atmospheric-pressure plasmas; Charge carrier processes; Dielectrics; Gases; Laboratories; Machinery; Nitrogen; Plasma applications; Plasma temperature; Radio frequency; dielectric barrier discharge; glow; perforated DBD; streamer;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.848616
