Title :
Pulsed Electron Beams for Annealing of Ion-Implanted Silicon
Author :
Little, R.G. ; Greenwald, A.C. ; Minnucci, J.A.
Author_Institution :
Spire Corporation Bedford, Massachusetts 01730
Keywords :
Annealing; Conducting materials; Electron beams; Photovoltaic cells; Power transmission lines; Pulsed power supplies; Semiconductor diodes; Semiconductor materials; Silicon; Temperature;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1979.4330462
